http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101274399-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D333-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2009-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101274399-B1 |
| titleOfInvention | Heteroaromatic photoacid generators free of fluorine and photoresist compositions containing them |
| abstract | Photoresist compositions containing fluorine-free photoacid generators and fluorine-free photoacid generators are possible as substitutes for PFOS / PFAS photoacid generator-containing photoresists. Photoacid generators are characterized by the presence of a heteroaromatic sulfonate anion component that does not contain fluorine. The photoacid generator preferably contains an onium cation component, more preferably a sulfonium cation component. The photoresist composition preferably contains an acid sensitive imaging polymer. The composition is particularly useful for forming material patterns using 193 nm (Arf) imaging radiation. |
| priorityDate | 2008-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 96.