http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101271248-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67178 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B35-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 2011-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101271248-B1 |
| titleOfInvention | Semiconductor manufacturing equipment for epitaxial process |
| abstract | According to an embodiment of the present invention, a semiconductor manufacturing apparatus includes a cleaning chamber in which a cleaning process is performed on a substrate; An epitaxial chamber in which an epitaxial process of forming an epitaxial layer is formed on the substrate; And a transfer chamber coupled to the side of the cleaning chamber and the epitaxial chamber and having a substrate handler for transferring the substrate having the cleaning process completed to the epitaxial chamber, wherein the cleaning chamber includes a plurality of substrates. It is characterized by the arrangement type which is made with respect to. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021257889-A1 |
| priorityDate | 2011-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.