| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-2982
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-03 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01F7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01F7-441
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01F7-441
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01F7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-20 |
| filingDate |
2009-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2013-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101268007-B1 |
| titleOfInvention |
Aluminum oxide particles and polishing composition comprising the same |
| abstract |
The present invention relates to aluminum oxide particles having a hexagonal shape and having primary particles having an aspect ratio of 1-5. It is preferable that the diameter of the average primary particle of an aluminum oxide particle is 0.01-0.6 micrometer. Preferably the aluminum oxide particles have an α conversion ratio of 5-70%. Moreover, it is preferable that the average secondary particle diameter of aluminum oxide particle is 0.01-2 micrometers, and it is preferable that the value which divided | divided 90% particle diameter of aluminum oxide particle by 10% particle diameter of aluminum oxide particle is 3 or less. Aluminum oxide particles are used, for example, as polishing particles for polishing a semiconductor device substrate, a hard disk substrate or a substrate for a display. |
| priorityDate |
2008-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |