http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101266140-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F17-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-06 |
| filingDate | 2010-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101266140-B1 |
| titleOfInvention | Liquid precursors for depositing Group IV metal containing films |
| abstract | The present invention relates to a liquid Group 4 precursor family represented by the formula (pyr * ) M (OR 1 ) (OR 2 ) (OR 3 ), wherein pyr * is alkyl substituted pyrrolyl, M Is a Group 4 metal comprising Ti, Zr and Hf, R 1-3 is the same or different and may be selected from the group consisting of linear or branched C 1-6 alkyl, preferably C 1-3 alkyl, R 4 is pyrrolyl Is selected from the group consisting of C 1-6 alkyl, preferably branched C 3-5 alkyl, substituted at positions 2, 5, so as not to be coordinated to the metal center in a manner, n is 2, 3, 4 . Most preferably, the present invention relates to (2,5-di-tert-butylpyrrolyl) (tris (ethoxy)) titanium, (2,5-di-tert-amylpyrrolyl) (tris (ethoxy )) Titanium and (2,5-di-tert-amylpyrrolyl) (tris (iso-propoxy)) titanium. The present invention further relates to (cyclopentadienyl) (2,5-di-methylpyrrolyl) (bis (ethoxy)) titanium. Also, a deposition method using these compounds is contemplated. |
| priorityDate | 2009-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 210.