http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101265416-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate | 2010-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101265416-B1 |
| titleOfInvention | Apparatus for Wetting Pretreatment for Enhanced Damascene Metal Filling |
| abstract | A pre-wetting device design and method are disclosed. Such device designs and methods are used to pre-wet the wafers before plating the metal on the wafers' substrates. A composition of a pre-wetting fluid is disclosed that prevents corrosion of the seed layer on the wafer and improves the filling rate of the features on the wafer. |
| priorityDate | 2009-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 55.