http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101264394-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4402 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04D17-168 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate | 2005-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101264394-B1 |
| titleOfInvention | Guiding device |
| abstract | An apparatus is provided for leading solid phase precursor compounds into a reactor in the gas phase. Such devices include a precursor composition of a solid precursor compound having a packing material layer arranged thereon. Also provided is a method for delivering saturated carrier gas to a precursor compound for delivery to a CVD reactor.n n n n Guiding device, precursor, chamber, deposition |
| priorityDate | 2004-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 58.