| abstract |
In order to provide a method for producing a mask blank substrate, a low thermal expansion glass substrate containing an oxide of titanium (Ti) is polished with an abrasive, and then treated with an aqueous solution containing hydrofluoric acid, and then acidic with a pH of 4 or less. It washes using a solution and washes using an alkaline solution.n n n n Absorber film, glass substrate for mask blank, multilayer reflective film, buffer film, substrate |