http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101256276-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30 |
| filingDate | 2010-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101256276-B1 |
| titleOfInvention | Etching liquid composition of multiple membranes and etching method thereof |
| abstract | The present invention relates to the combination of molybdenum or molybdenum alloy with one or more layers of copper or copper alloy, such as Cu / Mo laminated metal film, Cu / Mo-alloy laminated metal film, Cu-alloy / Mo-alloy laminated metal film Provided is an etchant capable of efficiently and excellently batch-etching multiple films comprising at least one layer simultaneously. The present invention is based on the total weight, 50-80 wt% phosphoric acid; Nitric acid 0.5-10 wt%; Acetic acid 5-30 wt%; 0.01-5 wt% of imidazole; And it relates to an etchant comprising a residual amount of water, and also relates to an etching method of a multilayer using such an etchant. The additive imidazole here serves as a Cu / Mo galvanic reaction controller. |
| priorityDate | 2010-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 51.