| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b20cd2bfe0fb9acdf266809d29694231 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26506
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-185 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate |
2011-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ed41826225b63ab43f020b3ab6d3457
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bedb9874f09b216160465e6f3c32a4ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f02dfd1d82e52b281931a836e7dd6178
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78ef46e6d8c9cb683b7651292dad33e7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcfbc8a6afa80bc01698ddcff7c313bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61bf5f36da03b6f01f517330ababefb7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc49171e3dea6b5f7588c3aca74b6b78 |
| publicationDate |
2013-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101254716-B1 |
| titleOfInvention |
Method for manufacturing a transition substrate having a pattern |
| abstract |
The present invention relates to a method for manufacturing a transition substrate having a pattern, and more particularly, to a method for manufacturing a transition substrate having a pattern capable of forming a pattern on the transition substrate without a repeating pattern forming process. To this end, the present invention comprises the ion implantation step of forming an ion implantation layer by implanting ions into the first substrate; A bonding step of contacting the ion implantation surface of the first substrate with a second substrate, contacting the mask substrate having a pattern with the first substrate or the second substrate, and then pressing and bonding the substrate; And separating the first substrate from the second substrate; It provides a transition substrate manufacturing method having a pattern comprising a. |
| priorityDate |
2011-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |