http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101234353-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate | 2010-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101234353-B1 |
| titleOfInvention | Physical vapor deposition apparatus having a porous cathode screen and surface treatment method using the same |
| abstract | The present invention relates to a physical vapor deposition apparatus having a porous cathode screen and a surface treatment method using the same, an embodiment of the present invention is to install a porous cathode screen so that plasma does not occur directly on the workpiece, the porous cathode screen It provides a physical vapor deposition apparatus that can inject and diffuse nitrogen ions into the workpiece by applying DC or pulsed high voltage to the activated ions, and it is possible to perform composite coating with excellent adhesion without continuous surface polishing. Provide a treatment method. |
| priorityDate | 2010-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.