http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101230673-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8887 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8851 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-95684 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2009-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101230673-B1 |
| titleOfInvention | Probe mark inspection device, probe device, and probe mark inspection method, and storage medium |
| abstract | The present invention provides a probe mark inspection device capable of automatically and accurately detecting an exposure situation such as the presence or absence of exposure of the base layer of an electrode pad to a substrate after inspection, a probe device provided with the device, and a probe mark inspection method. And a storage medium in which an execution program of the inspection method is stored. The solution means obtains the B component data D4 selected from the R component data D2, the G component data D3 and the B component data D4 according to the difference in reflectance between the material of the electrode pad 2 and the material of the base layer 6. Regarding the RGB component acquisition unit 50 and the B component data D4, the relationship data between the gray level set for acquiring the image of the base layer 6 different from the electrode pad 2 and the number of pixels having the gray level is obtained. The B component histogram acquisition part 52 is calculated | required, and the presence or absence of the exposure of the base layer 6 in the probe mark 10 is determined based on the obtained histogram. |
| priorityDate | 2008-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.