http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101226076-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2059 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11C11-15 |
| filingDate | 2005-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101226076-B1 |
| titleOfInvention | 2D array structure manufacturing method of nano magnetic material |
| abstract | The present invention relates to a method of manufacturing a nanomagnetic two-dimensional array structure, comprising the steps of forming a magnetic film on a substrate, depositing an amorphous carbon thin film crystallized by electron beam irradiation on the magnetic film, and an electron beam on the carbon thin film Irradiating an electron beam according to a desired nanoarray pattern, wherein a region irradiated with an electron beam of the carbon thin film is crystallized; Forming a nanomagnetic array by dry etching the magnetic layer using the carbon thin film pattern as a mask, and removing the carbon thin film pattern from the nano magnetic array. It provides a method of manufacturing an array structure.n n n n Nano sized ferromagnet, carbon thin film, C60 fullerene |
| priorityDate | 2005-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.