http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101222746-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0054 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L19-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L7-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L7-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L13-06 |
| filingDate | 2011-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101222746-B1 |
| titleOfInvention | Pressure sensor |
| abstract | An object of the present invention is to provide a compact high performance pressure sensor. Outer peripheral part of the sensor chip 10, the differential pressure diaphragm 4 provided in the center part of the sensor chip 10, the differential pressure gauge 5 provided in the differential pressure diaphragm 4, and the differential pressure diaphragm 4 A positive pressure diaphragm 17 provided at the first side, a first positive pressure gauge 16d formed at an end of the positive pressure diaphragm 17, and a second positive pressure gauge 15b formed at the center of the positive pressure diaphragm 17. Pressure sensor. |
| priorityDate | 2010-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.