http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101222478-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-96 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B38-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-565 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-91 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-565 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B38-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-622 |
| filingDate | 2011-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101222478-B1 |
| titleOfInvention | Painless porous ceramic material for vacuum chuck and its manufacturing method |
| abstract | The painless porous ceramic material for vacuum chuck according to the present invention comprises silicon carbide particles (SiC) and metal silicon (Si) particles, 2.0 wt% or less carbon (C), and 1.0 to 5.0 wt% boron (B). It is configured to include and characterized in that the micropores are formed. According to the present invention, a method for producing a pain-resistant porous ceramic material for vacuum chucks includes 14 to 30 wt% of metal silicon (Si) particles, 2.0 wt% or less of carbon (C), and 1.0 to 5.0 wt% of boron (B). And a material preparation step of preparing the silicon carbide particles (SiC) and the plasticizer, the material mixing step of mixing the materials, and a material forming step of forming the molded body by molding the material. Sintering the molded body is characterized by consisting of a sintering step of completing a pain-resistant porous ceramic material for vacuum chuck having micropores. |
| priorityDate | 2011-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.