http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101222449-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K2323-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2005-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101222449-B1 |
| titleOfInvention | Fine pattern formation method |
| abstract | A fine pattern forming method for effectively miniaturizing a resist pattern using a fine pattern forming material, which provides a fine pattern forming method which suppresses the film thickness of a crosslinked film and is free from development defects. A fine pattern is formed using a fine pattern forming material containing a water-soluble resin, a water-soluble crosslinking agent, and a solvent composed of water or a mixture of water and a water-soluble organic solvent and a developer containing an amine compound. The amine compound-containing developer includes primary amine compounds such as polyallylamine, monomethanolamine and monoethanolamine, secondary amine compounds such as dimethylamine, diethylamine, dimethanolamine and diethanolamine, trimethylamine and triethylamine And tertiary amine compounds such as trimethanolamine and triethanolamine, and quaternary amine compounds such as tetramethylamine hydroxide are preferable.n n n n Fine pattern formation method, resist pattern, crosslinking film, water-soluble resin, crosslinking agent, water, water-soluble organic solvent, amine compound, developer |
| priorityDate | 2004-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 50.