| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76811
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31633
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02351
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02362
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
2005-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2013-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101221582-B1 |
| titleOfInvention |
Low temperature process to produce low-kV dielectrics with low stress by plasma-enhanced chemical vapor deposition [PECD] |
| abstract |
Low K dielectric films exhibiting low mechanical stress can be formed utilizing various techniques in accordance with the present invention. In one embodiment, the carbon-containing silicon oxide films are formed at low temperature (up to 300 ° C.) by plasma-assisted chemical vapor deposition (PACVD). According to another embodiment, the carbon-containing silicon oxide films in the initial deposition state comprise porogens, the subsequent liberation of which reduces film stress. |
| priorityDate |
2004-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |