| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0c6c51895947c6a13bf74c2311e88c2c |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06738
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06755
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0675 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate |
2012-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81fd199f70ae52cb5b39a20611b0ec3a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c0016b2c07e4d99eb2f88c4672b6b63 |
| publicationDate |
2012-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101215366-B1 |
| titleOfInvention |
Manufacturing method of contactor, Manufacturing method of semiconductor inspection device, Contactor and semiconductor inspection device including same |
| abstract |
Disclosed is a manufacturing method of a contactor, a manufacturing method of a semiconductor inspection apparatus, a contactor, and a semiconductor inspection apparatus including the same. The manufacturing method of the contactor may include: manufacturing a wire having a predetermined diameter and made of rhodium 100 wt%; And etching one end of the wire. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101736142-B1 |
| priorityDate |
2012-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |