http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101199045-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0445 |
| filingDate | 2011-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101199045-B1 |
| titleOfInvention | Thin Film Solar Cell Texturing Method Using Apparatus, Apparatus and Textured Thin Film Solar Cell |
| abstract | Provided are a thin film solar cell texturing method and apparatus using droplets and a thin film solar cell textured thereby. A thin film solar cell texturing method using droplets according to the present invention may include forming a texturing solution droplet; Injecting texturing solution droplets into a plasma reactor in which a thin film solar cell is deposited therein; And texturing the thin film solar cell, and the texturing method and apparatus according to the present invention, unlike the conventional texturing process, which is performed in multiple stages in a separate chamber, all the texturing processes in one chamber are performed. do. Therefore, there is an advantage of being more environmentally friendly because it uses a plasma reactor that is excellent in process economy and easy in process control, compared to the prior art using wet etching solution. |
| priorityDate | 2011-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.