| abstract |
The invention relates to alkoxy or acyloxy silanes having at least one group having an ethylenically unsaturated bond, attached to a silicon atom (a), alkoxy or acyloxy silanes having at least one group containing an aromatic ring, bonded to a silicon atom (b) at least one layer in the manufacture of an electronic device comprising a latent catalyst (c) and optionally alkoxy or acyloxy silane (d) having at least one C 1 -C 6 alkyl group bonded to a silicon atom. It relates to a curable organic silicate composition, which is used to form.n n n Organic silicates, microelectronic devices, hardmasks, photoresists, antireflective coatings. |