http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101195713-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C49-92 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C49-92 |
| filingDate | 2005-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101195713-B1 |
| titleOfInvention | Raw material for thin film formation and manufacturing method of thin film |
| abstract | The raw material for forming a thin film of the present invention contains a bis (β-diketonato) zinc compound which is a liquid at 25 ° C., and is suitable for the formation of a zinc-containing thin film. In addition, there is no problem in transporting raw materials in in-line, and stable film production can be performed with stable film formation speed and thin film composition control.n n n As a preferable ((beta)-diketonato) zinc compound, bis (octane-2, 4- dionato) zinc and bis (2, 2-dimethyl-6-ethyldecane-3, 5- dionato) zinc are mentioned, for example. Can be mentioned.n n n n Raw material for thin film formation, zinc, precursor, stability, change over time, thin film composition control |
| priorityDate | 2004-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 220.