http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101173720-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-884 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-8828 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-231 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-066 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2007-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101173720-B1 |
| titleOfInvention | Compositions and Methods for CPM of Phase Change Alloys |
| abstract | The present invention provides a chemical-mechanical polishing (CMP) composition suitable for polishing a substrate comprising a phase change alloy (PCA), such as a germanium-antimony-tellurium (GST) alloy. The compositions of the present invention comprise any oxidizing agent, at least one chelating agent and an aqueous carrier therewith, with up to 6% by weight particulate abrasive. Chelating agents chelate materials formed from PCA while chelating a phase change alloy or component thereof (eg, germanium, indium, antimony and / or tellurium species) present in the substrate, or polishing the substrate with a CMP composition. Compound or combination of compounds that can be formulated. Also disclosed is a CMP method for polishing a phase change alloy containing substrate using a composition of the present invention.n n n Germanium-antimony-tellurium alloys, phase change alloys, chemical-mechanical polishing, chelating agents |
| priorityDate | 2006-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 79.