http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101172091-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0242 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-12 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02458 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0254 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02579 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate | 2005-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101172091-B1 |
| titleOfInvention | Type nitride semiconductor and its manufacturing method |
| abstract | The present invention provides a nitride layer growth step of growing a nitride layer that is not doped dopant on the substrate; A nitrogen lattice layer growing step of forming a nitrogen lattice layer having a plurality of void lattice sites on the nitride layer; Filling the empty lattice sites of the nitrogen lattice layer with predetermined Group 4 elements; And a removing step of removing the predetermined Group 4 element surplus in the implantation step, wherein the predetermined Group 4 element acts as an acceptor. will be.n n n In another aspect, the present invention provides a nitride semiconductor device having a p-type nitride layer, wherein the p-type nitride layer is a p-type nitride layer doped with a Group 4 element. It is about.n n n n Nitride Semiconductors, Conductivity, Crystalline, Group 4 Elements |
| priorityDate | 2005-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.