http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101170035-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24612 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-31 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C23-0075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C23-006 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C23-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-02 |
| filingDate | 2005-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101170035-B1 |
| titleOfInvention | Substrate Cleaning Method |
| abstract | The present invention relates to a method of continuous vacuum cleaning of a substrate, which selects species having low spraying performance and chemically reacting to contaminants; Generating a plasma from a gas mixture, in particular a gas mixture based on oxygen, consisting primarily of said low injection performance species by at least one linear ion source; Injecting at least a portion of the surface of the substrate into the plasma to at least partially chemically remove contaminants that may be absorbed or located on a portion of the surface. |
| priorityDate | 2004-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 71.