http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101167548-B1
Outgoing Links
Predicate | Object |
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classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1337 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1337 |
filingDate | 2008-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2012-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2012-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-101167548-B1 |
titleOfInvention | Porous silica precursor composition and manufacturing method thereof, porous silica film and forming method thereof, semiconductor element, image display device, and liquid crystal display device |
abstract | The porous silica precursor composition is represented by Chemical Formula 1: R 1 m (R 2 -O) 4-m Si (wherein R 1 and R 2 may be the same as or different from each other as an alkyl group, and m represents an integer of 0 to 3). And an organosilane represented by), water, an alcohol, and the formula: R 3 N (R 4 ) 3 X (wherein R 3 and R 4 may be the same as or different from each other as an alkyl group, and X represents a halogen atom) It is made by containing the quaternary ammonium compound shown, and is manufactured by mixing these components. The porous silica precursor composition is applied and calcined to form a porous silica film. A semiconductor element, an image display element, and a liquid crystal display element which have a porous silica film. |
priorityDate | 2007-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 74.