http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101154215-B1

Outgoing Links

Predicate Object
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24992
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249921
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-8445
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45523
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31633
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
filingDate 2005-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2012-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2012-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-101154215-B1
titleOfInvention SiOC: H coated substrate and its manufacturing method
abstract The present invention relates to a coated substrate containing a barrier layer comprising hydrogenated silicon oxycarbide having a density of at least 1.6 g / cm 3 and a method for producing the coated substrate.n n n n Coated substrate, hydrogenated silicon oxycarbide, density, buffer layer, barrier layer
priorityDate 2004-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002173172-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70435
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID81284
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544403
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57376941
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414806237
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458434260
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544406
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23968
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62322
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66187
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458357694
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422964455
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21750376
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414872365
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415772498
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415744391
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23953
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458433298
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414883636
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18193
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414806142
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13075
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5251495
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70700095
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69891
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66185
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18137
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14025
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71317390
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415733499
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513432
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419601022
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426064300
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414883544
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70434
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415733498
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420380674

Total number of triples: 65.