http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101150791-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B23-024 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
filingDate | 2008-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2012-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2012-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-101150791-B1 |
titleOfInvention | An information processing apparatus, an information processing method, and a computer readable recording medium having recorded thereon a program. |
abstract | (Problem) In the conventional information processing apparatus, there existed a problem that the state of a semiconductor process cannot be detected with high precision from the time series data regarding a semiconductor process. (Solution means) A first input receiving unit 101 for receiving first information that is time series data relating to a semiconductor process, a second input receiving unit 102 for receiving second information that is time series data relating to a semiconductor process, and a first The window function processing unit 103 which extracts information within a predetermined period of information using a window function to obtain window acquisition information, the window acquisition information extracted by the window function processing unit 107, and the second information. A correlation calculation section 109 for calculating a correlation function and an output section 111 for outputting information according to the calculation result of the correlation calculation section 109 were provided. |
priorityDate | 2007-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.