http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101149003-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-16 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-44 |
| filingDate | 2010-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101149003-B1 |
| titleOfInvention | Titanium, aluminum metal laminated film etching liquid composition |
| abstract | BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a titanium and aluminum metal laminate film etching liquid composition, and more particularly, a layer made of titanium or an alloy containing titanium mainly formed by sputtering on insulating film substrates such as glass, silicon substrates, and compound semiconductor substrates. And the concentration of the fluorine compound capable of collectively etching the laminated film by controlling the taper angle to 30 to 90 ° without damaging the substrate or the like, without damaging the substrate or the like with a metal laminated film containing a layer composed of aluminum or an aluminum-based alloy. However, it is related with the etching liquid composition which is 0.01-5 mass% (except hydrofluoric acid) and 0.1-50 mass% of the density | concentration of a specific oxidizing agent. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101584937-B1 |
| priorityDate | 2005-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 107.