http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101148760-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32018 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32669 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3277 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32761 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32752 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32577 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 |
| filingDate | 2008-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101148760-B1 |
| titleOfInvention | Plasma CVD apparatus |
| abstract | A pair of film-forming rolls 2 and 3 arranged in parallel to face each other so as to face the wound base material S, and provided in the interior of each of the film-forming rolls 2 and 3 to face an opposing space 5 between the film-forming rolls. Magnetic field generating members 12 and 13 for generating a magnetic field so as to converge the plasma in the vicinity of the roll surface facing the surface), a plasma power supply 14 in which one electrode and the other electrode are reversed in polarity, and the opposite And a gas supply pipe 8 for supplying the deposition gas to the space 5 and vacuum exhaust means for evacuating the opposing space. One electrode of the plasma power supply 14 is connected to one film forming roll 2, and the other electrode is connected to the other film forming roll 3.n n n n Base material, film formation roll, magnetic field generating member, polarity, gas supply pipe |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101444856-B1 |
| priorityDate | 2007-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.