http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101141987-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C239-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-134363 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-016 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate | 2009-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101141987-B1 |
| titleOfInvention | Dissolution Modification Chemical Solution and Dissolution Modification Treatment Method |
| abstract | An object of the present invention is to provide a solution for dissolution deformation that can be subjected to a uniform solution for dissolution deformation of an organic film pattern. The present invention is a chemical liquid for use in the dissolution deformation treatment of an organic film pattern, and is a chemical solution for dissolution deformation containing at least one of amides and nitriles. Moreover, this invention is a chemical | medical solution for dissolution deformation containing at least a nitrogen containing alkali component and a solvent for dissolution deformation | transformation as a chemical liquid used for the dissolution deformation process of an organic film pattern.n n n n Melt strain treatment, melt strain chemicals, organic film pattern, reflow treatment, reflow solvent |
| priorityDate | 2008-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 60.