http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101135565-B1

Outgoing Links

Predicate Object
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02087
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
classificationIPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
filingDate 2004-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2012-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2012-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-101135565-B1
titleOfInvention Tungsten Metal Removal Liquid and Tungsten Metal Removal Method Using the Same
abstract The present invention relates to a stable acid removal liquid for removing unnecessary tungsten metal formed on or attached to a semiconductor substrate, and a method for removing tungsten metal using the same. More specifically, the present invention relates to a removal liquid of tungsten metal formed or attached to a semiconductor substrate. The removal liquid containing bovine periodic acid and water, and a tungsten metal removal method using the same.n n n n Semiconductor substrate, tungsten metal, removal liquid
priorityDate 2003-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002016053-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06200384-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100271769-B1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24445
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID9913
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID65185
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412584819
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425762086
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520437
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID9913
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524198
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11600682
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23964
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25289
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449477149
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448129216
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524205
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579081
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16212546
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6857432
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556104
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1118
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20975871
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24948
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450502001
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457280313

Total number of triples: 57.