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filingDate 2004-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2012-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2012-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-101111231-B1
titleOfInvention Micro Well Array Chip and Manufacturing Method Thereof
abstract A microwell array chip having a plurality of microwells on one major surface of the substrate, the microwell array chip having a shape and dimension in which only one living cell is stored in one microwell, on the same substrate surface as the opening of the microwell. Microwell array chip with markers of microwells. A microwell array chip having a plurality of microwells on one major surface of a substrate, the microwells having a shape and dimension such that only one living cell is stored in one microwell. It has a projection to narrow the opening to the opening of the micro well. The manufacturing method of this micro well array chip. Forming a film on at least one major surface of the substrate, applying a resist on the formed film, exposing through a mask having a micro well pattern on the resist surface, and removing an uncured portion of the resist, the film and the substrate Etching the exposed portion of the microwell array, and removing the resist. A microwell array chip made of silicon having a plurality of microwells and used to store one subject living cell in each microwell. The microwells have a shape and dimensions such that only one living cell is stored in one microwell.n n n n  Microwell array chip, resist, biological cell, marker, silicone
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priorityDate 2003-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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