http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101110633-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-112 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-3678 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-253 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C23-007 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-36 |
| filingDate | 2009-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101110633-B1 |
| titleOfInvention | Fluorine-containing Tin Oxide Thin Film Manufacturing Equipment |
| abstract | The FTO thin film manufacturing apparatus according to the present invention, in the apparatus for manufacturing the FTO thin film by one of spray coating method, ultrasonic spray coating method or ultrasonic spray spray method, FTO precursor droplets flow in parallel with the substrate It includes a deposition chamber having a spraying portion for spraying the FTO precursor droplets on one side and the exhaust portion for sucking and exhausting the FTO precursor droplets injected on the other side to be deposited on the substrate.n n n n FTO thin film, FTO precursor, spray, exhaust |
| priorityDate | 2009-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.