http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101089264-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06727 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R3-00 |
| filingDate | 2009-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101089264-B1 |
| titleOfInvention | Probe unit having a buffer portion having an elastic force on the lower surface of the cantilever and its manufacturing method |
| abstract | The present invention relates to a probe unit using a semiconductor process technology and MEMS technology. The probe unit, the upper substrate; Lower substrate; And a buffer part formed of a polymer material having an elastic force and formed between a lower surface of the upper substrate and an upper surface of the lower substrate. The upper substrate has a bulk portion, a pan portion, and a plurality of cantilever beams, and the buffer portion is formed between the bottom surface of the pan portion and cantilever and the upper surface of the lower substrate and is not formed between adjacent cantilever beams. The buffer part is formed of a polymer material having a high elastic force, thereby excellent bonding strength between the upper substrate and the lower substrate, and absorbs and mitigates the impact of the external force applied to the cantilever beam. In particular, the buffer portion is formed of a polymer material having a patterning property by a photolithography process and the buffer portion is etched by using the fan portion and the cantilever of the upper substrate as a mask, so that the buffer portion is formed only on the lower surface of the cantilever beam and the cantilever beam is not formed. Do not form on the The probe unit according to the present invention can improve the mechanical durability of the cantilever type probe unit by dispersing the local load generated in the cantilever beam by overdriving and minimizing the influence between the cantilever beams.n n n n Cantilever, probe unit, high elastic polymer material |
| priorityDate | 2009-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.