http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101071429-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1316 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1313 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13 |
| filingDate | 2004-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101071429-B1 |
| titleOfInvention | Plasma source |
| abstract | The present invention relates to a plasma source capable of simplifying the gas piping line and leading to laminar flow in the flow of gas fluid up to plasma generation, thereby maximizing cleaning efficiency.n n n According to the present invention, a gas supply port formed at one side and supplying gas from the outside, a hollow portion connected to the gas supply port, and a length of an upper portion of an outer circumferential surface for uniformly injecting gas introduced into the hollow portion into a source Provided is a plasma source including a gas distributor having a plurality of gas injection holes arranged at predetermined intervals along a direction.n n n n plasma |
| priorityDate | 2004-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 |
Total number of triples: 15.