http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101062372-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-335 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32541 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-4645 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3255 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32559 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-34 |
| filingDate | 2009-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101062372-B1 |
| titleOfInvention | Plasma electrode for atmospheric pressure plasma processing apparatus and method of forming the same |
| abstract | An atmospheric pressure plasma processing apparatus having a plasma electrode capable of preventing the generation of voids and oxidation of the plasma electrode is disclosed. The plasma electrode for an atmospheric pressure plasma processing apparatus is formed by coating an electrode layer made of a conductor material inside a barrier made of an insulator material.n n n n Atmospheric plasma processing apparatus, plasma electrode |
| priorityDate | 2009-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.