http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101056719-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0233 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0755 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00 |
| filingDate | 2004-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101056719-B1 |
| titleOfInvention | Formation method of cured resin pattern |
| abstract | The present invention provides a method of forming a cured resin pattern having a desired cross-sectional shape.n n n The cured resin pattern forming method of the present invention comprises a radiation sensitive resin composition containing a curable alkali-soluble resin (A), a quinonediazide compound (B) and a photo cationic polymerization initiator (C). Applying to; Removing the solvent; Irradiating radiation through a mask; Developing with a developer to form a predetermined resin pattern; Irradiating the resin pattern with radiation; And a step of curing the resin pattern by heat treatment, wherein the method of the present invention is characterized in that the amount of radiation irradiated to the resin pattern is a minimum amount for inactivation of the quinonediazide compound. It is characterized by 40%-1000%. |
| priorityDate | 2003-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 425.