http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101022822-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0745 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1812 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-04 |
| filingDate | 2008-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101022822-B1 |
| titleOfInvention | Method of manufacturing photovoltaic device |
| abstract | The method of manufacturing a photovoltaic device of the present invention comprises the steps of placing a substrate on a loading plate in a reaction chamber, contacting the substrate placed on the loading plate and a substrate holder, injecting a source gas and a doping gas, and then decomposing it into a plasma. Depositing a thin film semiconductor layer, injecting an inert gas to form a plasma of the inert gas, and separating the substrate and the substrate holder.n n n n Photovoltaic, Plasma, Static Electricity |
| priorityDate | 2008-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.