http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101017550-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate | 2007-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101017550-B1 |
| titleOfInvention | Photosensitive resin laminate |
| abstract | In the photosensitive resin laminate having high characteristics and high adhesion, no splattering on the sidewall of the resist pattern, no depressions on the surface of the resist pattern, and very small sagging after resolution, problems in supporting film peelability It provides a photosensitive resin laminate having no. A photosensitive resin laminate obtained by sequentially laminating an intermediate having a layer thickness of 0.1 µm to 10 µm and a photosensitive resin layer on a supporting film, wherein the intermediate layer contains polyvinyl alcohol and a specific compound. A resin laminate is used. |
| priorityDate | 2006-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 197.