http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101014580-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04B1-123 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
filingDate | 2008-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2011-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2011-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-101014580-B1 |
titleOfInvention | Polymer compound, positive type resist composition, and resist pattern formation method |
abstract | Polymer compound which has a structural unit (a0) represented by the following general formula (a0-1), and the acrylate ester containing an acid dissociable, dissolution inhibiting group, and has a structural unit (a1) which does not correspond to this structural unit (a0). .n n n [Formula 1]n n n n n n n n [Wherein, R is a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; A is a divalent aliphatic cyclic group which may have a substituent, B is a divalent hydrocarbon group which may have a substituent, r is an integer of 0 or 1, and R 1 is an acid dissociable, dissolution inhibiting group.] |
priorityDate | 2007-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 268.