http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101005683-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N13-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 2008-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101005683-B1 |
| titleOfInvention | Retainer assembly |
| abstract | BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a retainer assembly, comprising: a retainer assembly for supplying current to a carrier assembly in a platen of an electrostatic chuck, the main body and a cable having a plurality of branch lines to supply current for each sector divided into a plurality of sections of the main body. And a plurality of ball connectors electrically connected to ends of the branch lines, mounted to protrude for each sector of the main body, and ball-supported to supply current to the carrier assembly. Accordingly, the present invention maintains the chuck current stably by allowing the retainer assembly to ball-contact and support the carrier assembly, thereby preventing the semiconductor wafer from dropping due to instability and weakening of the electrostatic force. This increases the yield of the semiconductor device and has the effect of extending the life of the component.n n n n Carrier assembly, patch, inner support, outer ball |
| priorityDate | 2008-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.