http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101005304-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3272 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00 |
| filingDate | 2003-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101005304-B1 |
| titleOfInvention | Tantalum Barrier Removal Solution |
| abstract | The present invention relates to chemical mechanical planarization solutions useful for the removal of tantalum barriers. The solution is 0 to 25% by weight of oxidizing agent, 0 to 15% by weight of inhibitor for nonferrous metals, 0 to 20% by weight of complexing agent for nonferrous metals, formamidine, formamidine salt, formamidine derivatives, guanidine derivatives, guanidine salts And 0.01 to 12% by weight of a tantalum remover selected from the group consisting of mixtures thereof, 0 to 5% by weight of abrasives, 0 to 15% by weight of particles selected from the group consisting of polymeric particles and polymer coated coated particles and a residual amount of water. Include. The solution is at least 3 to 1 as measured by a microporous polyurethane polishing pad pressure of less than 20.7 kPa measured tantalum nitride to TEOS selectivity perpendicular to the wafer. n n n Tantalum barriers, chemical mechanical planarization solutions, oxidizing agents, inhibitors, complexing agents, tantalum removers. |
| priorityDate | 2002-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 83.