http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100994920-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-185 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-185 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 |
| filingDate | 2008-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100994920-B1 |
| titleOfInvention | Vapor self-assembled monolayer coating device |
| abstract | Disclosed is a vapor-phase self-assembled monolayer coating apparatus that takes up less space and reduces manufacturing costs. The device is installed on one side of the chamber that provides space for mounting the substrate and includes one or a plurality of precursor injection devices in the form of a syringe. It also includes one or a plurality of precursor supply unit for supplying a liquid precursor to the precursor injector. n n Vapor self-assembled monolayer, coating, precursor injection device |
| priorityDate | 2008-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.