http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100991395-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-958 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76254 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C99-008 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C99-00 |
| filingDate | 2002-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100991395-B1 |
| titleOfInvention | Detachable Structures with Controlled Mechanical Strength and Methods of Producing Copper Structures |
| abstract | The present invention relates to a method of producing a detachable substrate, the method comprising generating an interface by means of attaching one side of a layer to one side of a substrate using molecular adhesion, wherein at least one of the sides is prior to said attachment. A processing step is provided, which enables mechanical support at the interface at a controlled level to be compatible with subsequent separation.n n n n Detachable Substrates, Molecular Bonding, Hydrofluoric Acid, Acid Etching, Assembly, Interfaces |
| priorityDate | 2001-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.