http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100984878-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H2242-20 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32669 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32174 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-4652 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 |
| filingDate | 2008-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100984878-B1 |
| titleOfInvention | Internally balanced coil for inductively coupled high density plasma processing chamber |
| abstract | Coils are provided that are used in semiconductor processing systems to generate plasma using magnetic fields in the chamber. The coil includes a first coil segment, a second coil segment and an internal balance capacitor. The first coil segment has a first end and a second end. The first end of the coil segment is configured to be connected to a power source. The second coil segment has first and second ends. The second end of the first coil segment is configured to be connected with an external balance capacitor. The inner balance capacitor is connected in series between the second end of the first coil segment and the first end of the second coil segment. The inner balance capacitor and coil segment are configured to provide another voltage peak to the first coil segment that is substantially aligned with the virtual ground along the second coil segment. |
| priorityDate | 2007-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.