| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J61-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2209-012 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1279
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J11-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J1-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J11-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J11-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J11-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J11-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J1-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-25 |
| filingDate |
2003-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2010-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100981946-B1 |
| titleOfInvention |
Method for forming metal oxide film and method for forming secondary electron emission film in gas discharge tube |
| abstract |
An object of the present invention is to provide a method for forming a metal oxide film with a more uniform thickness with respect to a three-dimensional surface such as an inner wall of a tube. n When the metal oxide film is formed by heat-treating the coating film containing the organometallic compound formed on the inner wall of the tube, the coating film is subjected to ultraviolet irradiation treatment or ozone treatment before or during the heat treatment. This problem is solved. n n Metal oxide film, electron emission film |
| priorityDate |
2002-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |