| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_37eb7cfa3558a58bbb336dd2190e210a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2030-027 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N25-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N30-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N30-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N30-30 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N25-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-02 |
| filingDate |
2009-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f6dddc668acbfd7ad74d42402539a6d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a92b1bc9142c3dad586a46a768da5e18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_268540c43d888083598b71c57ce20b02 |
| publicationDate |
2010-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100977991-B1 |
| titleOfInvention |
How to Analyze Titanium Chloride |
| abstract |
The present invention relates to an analysis method of titanium chloride, specifically, in the analysis of titanium chloride (TiCl 4 ) used for chemical vapor deposition, gas chromatography (Closing System) in a closing system that does not come into contact with moisture in the atmosphere ( The present invention relates to a method for analyzing titanium chloride using gas chromatography. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200094410-A |
| priorityDate |
2009-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |