http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100975802-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1266 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1218 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate | 2009-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100975802-B1 |
| titleOfInvention | A light emitting device and a method of forming a light emitting device |
| abstract | The present invention provides a peeling method that does not damage the layer to be peeled, and aims to be able to peel not only the layer to be peeled with a small area but also the layer to be peeled with a large area over the entire surface at a good production rate. It is done. A metal layer or nitride layer 11 is provided on the substrate, and further, an oxide layer 12 in contact with the metal layer or nitride layer 11 is provided, and a laminate film is formed or heat treated at a temperature of 500 ° C. or higher. If is performed, it can be easily and cleanly separated by physical means in the layer or on the interface with the oxide layer 12. n n Physical means, oxide layer, exfoliation, interface, semiconductor device |
| priorityDate | 2001-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.