http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100971066-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-167 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-143 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-283 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-108 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C53-15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C59-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-653 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C59-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C59-56 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C59-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C59-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C59-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C53-15 |
| filingDate | 2008-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100971066-B1 |
| titleOfInvention | Fluorine-containing compound, fluorine-containing polymer compound, negative type resist composition and pattern formation method using the same |
| abstract | The present invention provides a chemically amplified negative resist composition which is highly transparent to Kr excimer laser light or ArF excimer laser light, has high resolution, is free of swelling, and gives a resist pattern having a rectangular cross-sectional shape. Let's make it a task.n n n The present invention also relates to a fluorine-containing polymer compound having a weight average molecular weight of 1,000 to 1,000,000 comprising a repeating unit represented by the following formula and a repeating unit having an alcoholic hydroxyl group.n n n n n n n n (In the formula, R 3 is a fluorine atom or a fluorinated alkyl group, W represents a divalent connecting group. R 4, R 5 and R 6 are independently hydrogen atom, a fluorine atom or a monovalent organic group with each other or are mutually combined You may form a ring.) |
| priorityDate | 2007-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 62.