http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100970182-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61P29-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61P29-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-76 |
| filingDate | 2003-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100970182-B1 |
| titleOfInvention | Positive photoimageable bottom antireflective coating |
| abstract | The present invention comprises a novel absorbent, photoimageable, aqueous developable, polymer comprising at least one unit having a photoacid generator and an acid labile group and at least one unit having a light absorbing chromophore. And a positive antireflective coating composition. The invention also relates to a method of using such a composition. The present invention also provides a positive anti-reflective coating composition comprising a polymer comprising a novel light absorbing, photoimagingable, aqueous alkali developable, acid containing labile group, one or more units, dyes and photoacid generators. It is about. The invention also relates to a method of using such a composition. The present invention also relates to a novel method of forming positive images using positive photoresist and novel photoimageable, aqueous developable positive antireflective coating compositions. The present invention also relates to such compositions. The invention also relates to a method of forming an image with a photoimageable antireflective coating composition. |
| priorityDate | 2002-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 190.