http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100965904-B1

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grantDate 2010-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2010-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100965904-B1
titleOfInvention Method for forming metal oxide thin film pattern using nanoimprint and manufacturing method of LED device
abstract Metal oxide thin film pattern forming method using a nanoimprint according to an embodiment of the present invention, the step of coating a photosensitive metal-organic precursor solution on a substrate, the photosensitive metal-organic precursor coating layer with a pattern patterned to have an uneven structure Pressurizing, irradiating the pressurized photosensitive metal-organic precursor coating layer with ultraviolet rays to form a cured metal oxide thin film pattern, and removing the patterned mold from the metal oxide thin film pattern.
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